Rapid Thermal Processing of Semiconductors (1997) (Microdevices)
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- Synopsis
- Rapid thermal processing has contributed to the development of single wafer cluster processing tools and other innovations in integrated circuit manufacturing environments. Borisenko and Hesketh review theoretical and experimental progress in the field, discussing a wide range of materials, processes, and conditions. They thoroughly cover the work of international investigators in the field.
- Copyright:
- 1997
Book Details
- Book Quality:
- Publisher Quality
- ISBN-13:
- 9781489918048
- Related ISBNs:
- 9780306450549
- Publisher:
- Springer US
- Date of Addition:
- 01/28/21
- Copyrighted By:
- N/A
- Adult content:
- No
- Language:
- English
- Has Image Descriptions:
- No
- Categories:
- Nonfiction, Science, Technology
- Submitted By:
- Bookshare Staff
- Usage Restrictions:
- This is a copyrighted book.
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Other Books
- by Victor E. Borisenko
- by Peter J. Hesketh
- in Nonfiction
- in Science
- in Technology